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An open-source TCAD dataset and an agentic multi-agent system reportedly cut nanosheet FET design time from 7.1 days to 4.2 hours in one benchmark, signaling large potential productivity gains in device engineering while resting on a narrow, non-randomized comparison.

AgenticTCAD: A LLM-based Multi-Agent Framework for Automated TCAD Code Generation and Device Optimization
Guangxi Fan, Tianliang Ma, Xuguang Sun, Xun Wang, Kain Lu Low, Leilai Shao · December 26, 2025
arxiv descriptive low evidence 7/10 relevance Full text usable extracted full text Source PDF

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Arxiv

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  1. Guangxi Fan unresolved corpus identity
  2. Tianliang Ma unresolved corpus identity
  3. Xuguang Sun unresolved corpus identity
  4. Xun Wang unresolved corpus identity
  5. Kain Lu Low unresolved corpus identity
  6. Leilai Shao unresolved corpus identity

Semantic Scholar

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  1. Guangxi Fan provider ID
  2. Tianliang Ma provider ID
  3. Xuguang Sun provider ID
  4. Xun Wang provider ID
  5. Kain Lu Low provider ID
  6. Leilai Shao provider ID
AgenticTCAD—an open-source dataset, fine-tuned TCAD model, and multi-agent automation framework—reduced simulated NS-FET design time from a reported 7.1 days for human experts to 4.2 hours in a single validation.

Citation observations

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With the continued scaling of advanced technology nodes, the design-technology co-optimization (DTCO) paradigm has become increasingly critical, rendering efficient device design and optimization essential. In the domain of TCAD simulation, however, the scarcity of open-source resources hinders language models from generating valid TCAD code. To overcome this limitation, we construct an open-source TCAD dataset curated by experts and fine-tune a domain-specific model for TCAD code generation. Building on this foundation, we propose AgenticTCAD, a natural language - driven multi-agent framework that enables end-to-end automated device design and optimization. Validation on a 2 nm nanosheet FET (NS-FET) design shows that AgenticTCAD achieves the International Roadmap for Devices and Systems (IRDS)-2024 device specifications within 4.2 hours, whereas human experts required 7.1 days with commercial tools.

Summary

Main Finding

AgenticTCAD is an LLM-based, multi-agent framework that converts natural-language design specifications into end-to-end TCAD workflows (SDE + SDevice), runs simulations, extracts physical metrics and band diagrams, and iteratively optimizes device parameters. Using a fine-tuned domain model plus a commercial reasoning model, AgenticTCAD reached IRDS‑2024 performance targets for a 2 nm nanosheet FET (NS‑FET) in 4.2 hours — compared to 7.1 days for human experts using commercial tools.

Key Points

  • Purpose: automate TCAD code generation and device optimization to accelerate device design in the DTCO (design–technology co-optimization) pipeline.
  • Dataset: authors release the first open-source TCAD corpus of expert-crafted SDE and SDevice scripts (2D/3D devices, multiple materials, conventional and emerging device types), augmented with LLM-generated natural-language queries and expert filtering.
  • Models and workflow:
    • Fine-tuned an open LLM (Qwen2.5-14B-Instruct) on the TCAD dataset to generate both SDE (structure, mesh, doping, contacts) and SDevice (models, BCs, solver) scripts from natural language.
    • Multi-agent system: code-generation agent (fine-tuned model) + device optimization agent (commercial reasoning LLM, DeepSeek v3.1) that iterates on parameters, handles non-convergence recovery, and interprets simulation outputs.
  • End-to-end capability: generated executable scripts including meshing and physical models, ran Sentaurus simulations, automatically extracted Ion, Ioff, SS and band diagrams for interpretability and optimization feedback.
  • Performance claim: matching IRDS‑2024 logic device specs for a 2 nm NS‑FET in 4.2 hours vs 7.1 days for human experts with commercial tools.
  • Comparison to prior work: previous efforts often only generated SDE or lacked meshing/solver configs; AgenticTCAD covers both SDE and SDevice and adds closed-loop optimization.

Data & Methods

  • Dataset construction:
    • Expert-curated baseline SDE/SDevice scripts covering planar, FinFET, nanosheet, nanowire, and compound‑semiconductor devices.
    • Parameterized meshing strategies and realistic doping profiles (uniform + Gaussian implant-like).
    • LLM-assisted augmentation: commercial LLM prompted to create natural-language queries mapped to scripts, with expert verification to ensure physical plausibility; final dataset packaged in JSON pairs for SFT.
  • Fine-tuning (SFT):
    • Base model: Qwen2.5-14B-Instruct (open-source).
    • Training data: ~30,000 samples derived from dataset/augmentation.
    • Training regimen: 5 epochs, batch size 8, bfloat16; AdamW (β1=0.9, β2=0.95), weight decay 1e‑4, initial LR 1e‑5, cosine decay, 5% warmup.
    • Compute: ~107 GPU-hours on four NVIDIA A6000 GPUs.
    • Loss: causal LM objective with prompt tokens masked during loss so model learns to produce code, not copy prompts.
  • Execution and optimization loop:
    • TCAD execution using Synopsys Sentaurus W-2024.09‑SP1.
    • Post-processing: automatic extraction of I–V, C–V, Ion, Ioff, SS, and band diagrams (Ec, Ev, EFn, EFp).
    • Optimization agent: DeepSeek v3.1 reasoning LLM receives simulation outputs + design space and proposes next parameters; includes a recovery prompt workflow for non-convergent simulations.
  • Hardware for experiments: Linux workstation with 2× Intel Xeon Platinum 8375C (64 cores), 4× NVIDIA A6000 (48 GB each). Code-generation model deployed on one A6000.

Implications for AI Economics

  1. Productivity and R&D cost reduction

    • Large time savings reported (7.1 days → 4.2 hours) imply substantial acceleration of device iteration cycles. If reproducible across workloads, this can materially lower time‑to‑insight and engineering hours per iteration, reducing R&D labor costs and shortening product development timelines.
    • Faster iteration can raise effective innovation speed per dollar of R&D, shifting capital requirements: fewer human-hours per design but higher compute and software dependency.
  2. Democratization vs. concentration

    • An open TCAD dataset + fine-tuned open LLM lowers knowledge barriers to TCAD scripting and device simulation, enabling smaller groups and academic labs to perform advanced simulations they previously could not afford/time to create.
    • However, proprietary simulation engines (Sentaurus) and specialized compute remain important inputs. Value capture could shift: model and dataset providers enable broader access, but simulation tool vendors and cloud/GPU providers remain gatekeepers.
  3. Labor demand and skill composition

    • Automation will likely reduce routine scripting and parameter‑sweeping tasks performed by TCAD engineers but increase demand for higher-level roles: validation, interpretation of physics outputs, integration into design flows, and oversight of automated agents.
    • Skills will shift toward prompt engineering, model supervision, debugging non-convergent cases, and managing hybrid human-AI workflows.
  4. Capital and operational expenditure shifts

    • Costs move from labor (human experts) toward compute (GPUs), fine-tuning, and licensed simulation software. Organizations may prefer investing in model fine-tuning and GPU clusters to reduce expensive expert time.
    • For startups, open datasets and open LLMs reduce upfront data costs; but access to commercial simulators or high‑end compute may still be a barrier.
  5. Competitive dynamics and IP/security considerations

    • Open datasets and reproducible agentic frameworks can compress advantages held by incumbents who relied on proprietary simulation know‑how. That may spur competition and faster diffusion of device ideas.
    • Conversely, advanced node designs are strategically sensitive. Automating design may raise national-security/export-control concerns (faster development of cutting-edge nodes), and firms may withhold high-quality internal data to preserve competitive advantage.
    • Responsibility for generated designs (errors, IP infringement) raises new legal and contracting topics (who is accountable: model provider, tool vendor, or user?).
  6. Market for tools and services

    • New markets: fine-tuning / domain-adaptation services for TCAD; managed agentic workflows; integration layers connecting LLMs with EDA/TCAD backends.
    • Incumbent EDA/TCAD vendors could integrate LLM agents into their GUIs or offer model-augmented automation as premium features; alternatively, independent models could commoditize scripting and put pricing pressure on tool vendors.
  7. Measurement and policy implications

    • To quantify macro effects, measure: reduction in person-hours per design, improvement in success rates, iterations per year, and changes in R&D budgets allocation (labor vs compute). Empirical studies needed to validate claimed speedups across device classes.
    • Policymakers should monitor diffusion of agentic design tools for implications on technology concentration, export controls, and workforce retraining needs.
  8. Risks and caveats affecting economic outcomes

    • Reproducibility and generalization: the reported case (2 nm NS‑FET) is a strong demonstration, but wider generalization across device types and process corners must be validated. If generalization is limited, productivity gains will be smaller.
    • Dependence on proprietary components (Sentaurus, commercial LLMs for augmentation/reasoning) blunts the full democratizing potential and entails vendor lock-in.
    • Model errors or hallucinations can produce invalid designs or convergence failures, requiring expert oversight and possibly eroding trust unless reliable verification pipelines are in place.

Overall assessment for AI economics: AgenticTCAD exemplifies how domain-tuned LLMs plus multi-agent orchestration can materially compress high‑skill engineering workflows, shifting costs from human experts to compute and software integration. If generalized and adopted at scale, such systems could accelerate semiconductor R&D cadence, lower some barriers-to-entry, and reshape demand for specialized labor — but outcomes will depend on access to simulation software, compute resources, data availability, and the ability to manage reliability, IP and security concerns.

Assessment

Paper Typedescriptive Evidence Strengthlow — The core claim (4.2 hours vs 7.1 days) rests on a single validation instance and a non-randomized, non-blinded comparison; details about the human baseline (number of experts, experience, parallelization, tool configurations), run-to-run variability, and reproducibility are not provided, so results may reflect selection, measurement, or tool-configuration bias rather than a robust causal estimate of productivity gains. Methods Rigormedium — The authors contribute an expert-curated open-source TCAD dataset and a domain-specific fine-tuned model, and they implement an end-to-end multi-agent framework — all of which indicate substantive engineering and domain work; however, the evaluation lacks multiple benchmarks, ablations, statistical robustness checks, and sufficient reporting of experimental conditions for independent replication, limiting methodological rigor. SampleAn expert-curated open-source TCAD dataset (details on size and composition not provided in the summary) used to fine-tune a domain-specific language model for TCAD code generation; the system (AgenticTCAD) is validated on one 2 nm nanosheet FET (NS-FET) design task, compared against human experts using commercial TCAD tools (reported human time: 7.1 days; AgenticTCAD time: 4.2 hours). No information provided about number of trials, seeds, human participants, or variation in device targets. Themesproductivity innovation human_ai_collab IdentificationBenchmark comparison: measure wall-clock time to reach IRDS-2024 device specifications on a single 2 nm nanosheet FET design using the proposed AgenticTCAD pipeline (fine-tuned domain model + multi-agent orchestration) versus reported time by human experts using commercial TCAD tools; no randomization, no counterfactual controls, no statistical testing reported. GeneralizabilityEvaluation limited to a single device type (2 nm NS-FET); unclear performance across other device architectures or technology nodes., Results may depend on specific TCAD tool versions, simulator fidelity, and configuration; commercial tool vs open-source disparities could drive part of the time difference., Human baseline details (experience level, team size, allowed parallel work) are not specified, so comparison may not generalize to other expert teams or workflows., Production/manufacturing feasibility and transfer from simulation to fabricated devices are not demonstrated—simulation-to-reality gap may limit economic impact., Computational resource requirements for AgenticTCAD (GPU/CPU, license-free vs licensed tools) could limit adoption in resource-constrained settings.

Claims (7)

ClaimDirectionOutcomeConfidence & EvidenceDetails
With the continued scaling of advanced technology nodes, the design-technology co-optimization (DTCO) paradigm has become increasingly critical. Governance And Regulation positive importance/criticality of DTCO paradigm for advanced technology node scaling
Reading fidelity high
Study strength speculative
not reported
0.03
In the domain of TCAD simulation, the scarcity of open-source resources hinders language models from generating valid TCAD code. Developer Productivity negative language model ability to generate valid TCAD code (validity of generated TCAD code)
Reading fidelity high
Study strength medium
not reported
0.18
We construct an open-source TCAD dataset curated by experts and fine-tune a domain-specific model for TCAD code generation. Research Productivity positive availability of an open-source TCAD dataset and a fine-tuned domain-specific TCAD code generation model
Reading fidelity high
Study strength high
not reported
0.3
We propose AgenticTCAD, a natural language-driven multi-agent framework that enables end-to-end automated device design and optimization. Organizational Efficiency positive ability to perform end-to-end automated device design and optimization from natural language
Reading fidelity high
Study strength medium
not reported
0.18
Validation on a 2 nm nanosheet FET (NS-FET) design shows that AgenticTCAD achieves the International Roadmap for Devices and Systems (IRDS)-2024 device specifications within 4.2 hours. Task Completion Time positive time required for AgenticTCAD to reach IRDS-2024 device specifications
Reading fidelity high
Study strength medium
n=1
within 4.2 hours
0.18
Human experts required 7.1 days with commercial tools to reach the same device specifications on the 2 nm NS-FET design. Task Completion Time null_result time required by human experts with commercial tools to reach IRDS-2024 device specifications
Reading fidelity high
Study strength medium
7.1 days
0.18
AgenticTCAD reduces the time to meet IRDS-2024 specifications from 7.1 days (human experts with commercial tools) to 4.2 hours. Task Completion Time positive reduction in time to achieve target device specifications
Reading fidelity high
Study strength medium
n=1
4.2 hours vs 7.1 days
0.18

Notes